DC-Sputter Power Supplies
The DC-sputter power supplies are very compact built switched mode power supplies in the power range from 1kW up to 30kW DC. The generators are ideal for powering small magnetrons in production and laboratory facilities as well as in large-area magnetron coating for the deposition of conductive materials.
The integrated ARC-handling works extremely quick and automatic. In parallel operation the output power can be increased up to 240kW. Thanks to a special circuit arrangement a "Master-Slave-Wiring" is not necessary.
APPLICATIONS
The DC-sputter power supplies are suitable for simple magnetron sputtering, for single- and dual-magnetron sputtering for deposition of electrically conductive substrates, such as: coating of solar glass or architectural glass.
FEATURES AND BENEFITS
PRODUCT OVERVIEW
GS 15/1000
GSW 300/1000