DC-Sputter Power Supplies

The DC-sputter power supplies are very compact built switched mode power supplies in the power range from 1kW up to 30kW DC. The generators are ideal for powering small magnetrons in production and laboratory facilities as well as in large-area magnetron coating for the deposition of conductive materials.

 

The integrated ARC-handling works extremely quick and automatic. In parallel operation the output power can be increased up to 240kW. Thanks to a special circuit arrangement a "Master-Slave-Wiring" is not necessary.

APPLICATIONS

FEATURES AND BENEFITS

PRODUCT OVERVIEW

APPLICATIONS:

 

The DC-sputter power supplies are suitable for simple magnetron sputtering, for single- and dual-magnetron sputtering for deposition of electrically conductive substrates, such as: coating of solar glass or architectural glass.

FEATURES AND BENEFITS:

 

Fast ARC-Handling -> Higher productivity

 

Very high compact construction at high -> Easy integration at existing systems power density

 

Proved analogue technology -> High reliability

 

MODEL MAX. POWER VOLTAGE MAX. DC CURRENT COOLING
MAGS 15/1000 1.5kW 0–1000V 2.4A DC air
MAGS 20/1000 2kW 0–1000V 2.8A DC air
MAGS 30/1000 3kW 0–1000V 4.2A DC air
MAGX 80/1000 8kW 0–1000V 16A DC water
MAGX 100/1000 10kW 0–1000V 20A DC water
MAGX 150/1000 15kW 0–1000V 30A DC water
MAGSW 200/1000 20kW 0–1000V 35A DC water
MAGSW 300/1000 30 kW 0–1000V 50A DC water
MAGPULS

Stromversogungen

Chief executive:

Dipl. Ing. Dieter Schorn

Im Unterfeld 19

D-76547 Sinzheim

E-Mail.:

info@magpuls.net

Tel.:

+49 (0)7221 987 850

Fax.:

+49 (0)7221 987 454

© Magpuls Stromversorgungs Systeme GmbH