UNIPOLAR PULSED POWER SUPPLIES MODEL MAGPULS UP
The unipolar pulsed power supplies are designed in modular technology. The main components of these power supplies are the DC-Power supply and the pulsing unit which generate the pulsed output voltage with adjustable pulse frequency in the range from DC up to 100kHz. The Arc-management with highest efficiency is adjustable for all different Plasma treatment processes and grants a proper layer quality without any layer damages on the surface.
All pulse and power parameters can be controlled and indicated via the graphic LCD panel. Of course all parameters can be controlled via the RS232 interface a well as the optional PROFIBUS interface due to an external computer system.
APPLICATIONS
The unipolar Pulse power supplies model MAGPULS UP are designed for demanding processes with high plasma ARC behaviour. Due to their wide power range, they provide superior performance and are suitable for the following applications:
• Bias Supply for PE-CVD and PVD - Processes
• Pulse plasma nitriding
• Single magnetron sputtering
FEATURES AND BENEFITS
PRODUCT OVERVIEW
MP1-35
MP1-100
MP1-200
MP1-400
