BIPOLAR PULSED POWER SUPPLIES MODEL MAGPULS BP
The bipolar pulsed power supplies model MAGPULS BP are constructed for plasma excitation with highest performance. The bipolar pulsed power supply is a modular designed system consisting of the DC power unit and the bipolar pulse unit, which switches the voltage with a freely adjustable pulse of alternating polarity into the plasma system.
With a power range from 1kW up to 600KW and the adjustable frequency range from DC up to 100kHz, these pulsed power supplies offer highest flexibility for all Sputter applications and most sophisticated plasma CVD and PVD processes. Unlike many MF generators MAGPULS BP power supplies don’t need any additional matching networks.
The highly efficient ARC-management can be adjusted optimally for each deposition process to avoid layer defects effectively in the treated material surface.
All pulse and power parameters can be controlled and indicated via the graphik LCD panel. Of course all parameters can be controlled via the RS232 interface a well as the optional PROFIBUS interface due to an external computer system.
FEATURES AND BENEFITS
The bipolar pulse power supplies model MAGPULS BP are specially designed for all demanding plasma processes with highest performance . With their wide power range and the complete freely adjustable pulse frequency these pulse power supplies are best suited for plasma excitation for creating decorative layers, hard coating layers, manufacturing of flat panels as well as large area sputter coating, especially dual magnetron sputtering, like architectural glass, films and textile coatings.
FEATURES AND BENEFITS:
Frequency - and pulse parameters set free for -> universal use of the most plasma positive und negative Output polarity processes with one power supply
5 different pulse mode from DC, unipolar pulse -> flexible adjusting for all kind of process up to bipolar pulse mode request
Voltage control from 10V up to 1000V -> Highest flexibility with Bias coating Processes for plasma pre-treatment by etching or cleaning
Precise arc detection and shutdown -> avoid droplets and surface defects
Fast DSP-control -> Highest process performance
|MODEL||MAX. POWER||PULS-CURRENT||VOLTAGE||MAX. DC CURRENT||FREQUENCY|
|MP2-35||6kW||0–35A Pulse||0–1000V||10A DC||DC/0.5Hz–100kHz|
|MP2-60||10kW||0–60A Pulse||0–1000V||20A DC||DC/0.5Hz–100kHz|
|MP2-100||20kW||0–100A Pulse||0–1000V||40A DC||DC/0.5Hz–100kHz|
|MP2-200||40kW||0–200A Pulse||0–1000V||80A DC||DC/0.5Hz–100kHz|
|MP2-400||75kW||0–400A Pulse||0–1000V||150A DC||DC/0.5Hz–75kHz|
Dipl. Ing. Dieter Schorn
Im Unterfeld 19
+49 (0)7221 987 850
+49 (0)7221 987 454
© Magpuls Stromversorgungs Systeme GmbH