Puls-Plasma generators unipolar MAGPULS UP
UNIPOLARE PULSSTROMVERSORGUNGEN DER SERIE MAGPULS UP
The unipolar pulsed Power Supplies are designed in modular technology. The main components of these power supplies are the DC-Power supply and the pulsing unit which generate the pulsed output voltage with adjustable pulse frequency in the range from DC up to 100kHz. The Arc-management with highest efficiency is adjustable for all different Plasma treatment processes and grants a proper layer quality without any layer damages on the surface.
All pulse and power parameters can be controlled and indicated via the graphic LCD panel. Of course all parameters can be controlled via the RS232 interface a well as the optional PROFIBUS interface due to an external computer system.
APPLICATIONS
FEATURES AND BENEFITS
PRODUCT OVERVIEW
APPLICATIONS:
The unipolar Pulse power supplies model MAGPULS UP are designed for demanding processes with high plasma ARC behaviour. Due to their wide power range, they provide superior performance and are suitable for the following applications:
• Bias Supply for PE-CVD and PVD - Processes
• Pulse plasma nitriding
• Single magnetron sputtering
FEATURES AND BENEFITS:
Frequency - and pulse parameters set free -> universal use of different processes with one generator
Fast ARC detection and shutdown -> avoid droplets and surface defects
Voltage regulation from 10V to 1000V -> Highest flexibility with Bias coating processes for plasma pre-treatment by etching or cleaning
Very fast DSP-control -> Highest process performance
| MODEL | MAX. POWER | PULS-CURRENT | VOLTAGE | MAX. DC CURRENT | FREQUENCY |
|---|---|---|---|---|---|
| MP1-35 | 6kW | 0–35A Pulse | 0–1000V | 10A DC | DC/0.5Hz–100kHz |
| MP1-60 | 10kW | 0–60A Pulse | 0–1000V | 20A DC | DC/0.5Hz–100kHz |
| MP1-100 | 20kW | 0–100A Pulse | 0–1000V | 40A DC | DC/0.5Hz–100kHz |
| MP1-200 | 40kW | 0–200A Pulse | 0–1000V | 80A DC | DC/0.5Hz–100kHz |
| MP1-400 | 75kW | 0–400A Pulse | 0–1000V | 150A DC | DC/0.5Hz–75kHz |
Stromversogungen
Chief executive:
Dipl. Ing. Dieter Schorn
Im Unterfeld 19
D-76547 Sinzheim
E-Mail.:
info@magpuls.net
Tel.:
+49 (0)7221 987 850
Fax.:
+49 (0)7221 987 454
© Magpuls Stromversorgungs Systeme GmbH